In this research, the effect of ions produced in deuterium Plasma on Tungsten (W) and Aluminum (Al) plates has been investigated using a Plasma Focus device with the specifications of (C=10.4 μF, V=23 kV, E=2.75 kJ). The W samples used because it is one of the key elements in the Tokamak device. Because we wanted to put the W samples at the distance from the anode top with maximum Plasma produced ions, we should find the optimum place. Due to the high cost of W samples, we used Al samples to find the optimal conditions. The samples were irradiated at 8 cm distance from the anode top with deuterium ions produced by a Plasma Focus device. The sample analyses were done by the SEM and EDX methods. The sample irradiation by deuterium Plasma ions caused a lot of damages and bubble formation on the sample surfaces. The analyses showed the extent of surface damage and the number of ions deposited on the surface. The number of damages on the Al surface was much higher than W. Bubbles were formed on the surface were due to the impact of deuterium ions on the W and Al samples. Also, the deuterium ion energy was measured with a Faraday cup as about 50 keV.